Dr. James McVittie goes into further detail on Dry Etching: Basics of Plasmas & Types of Dry Etching Tools (Part 2 of 4) from Stanford Nanofabrication Facility (SNF).

This video is part of an open online course found here: https://lagunita.stanford.edu/courses...

For more information:
https://snf.stanford.edu/
http://nanolabs.stanford.edu/